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Laser drilling with a top-hat beam of micro-scale high aspect ratio holes in silicon nitride - ScienceDirect

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Laser drilling with a top-hat beam of micro-scale high aspect ratio holes in silicon nitride - ScienceDirect

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PDF) Microhole drilling using reshaped pulsed Gaussian laser beams

Laser drilling with a top-hat beam of micro-scale high aspect ratio holes in silicon nitride - ScienceDirect