Double hot arm and U-shape flexural thermal actuators and their

Double hot arm and U-shape flexural thermal actuators and their

Deflection-time curve of the thermal actuator under the creep

Temperature distribution (in °C) under 4.5 V loading

Temperature distribution along the actuator length. The path

PDF) Creep and Fatigue Failure in Single- and Double Hot Arm MEMS

Double hot arm and U-shape flexural thermal actuators and their

Hamid JAHED, Professor (Full), PhD

Creep and Fatigue Failure in Single- and Double Hot Arm MEMS

PDF) Creep and Fatigue Failure in Single- and Double Hot Arm MEMS